Industries / High-Purity Manufacturing / Semiconductor & Microelectronics
Industries We Serve

Semiconductor &
Microelectronics

Photolithography Etching CMP Wafer Rinsing

Semiconductor fabrication is among the most water-intensive, quality-critical industries in the world — a single 300 mm wafer fab consumes thousands of litres of Ultra-Pure Water (UPW) every minute across photolithography, etching, CMP and wafer rinsing. Trace contamination — ionic, particulate or organic — measured in parts per billion can render entire production batches defective.

With 25+ years of expertise, Ahura Aqua delivers end-to-end UPW generation, storage, loop distribution and wastewater recovery — engineered to protect yield at the most demanding purity levels.

Semiconductor Value Chain Design → Shipment
DSGN 01
Chip Design
FAB 02
Wafer Fabrication
SORT 03
Wafer Probe / Sort
PKG 04
Assembly & Packaging
TEST 05
Final Testing
QUAL 06
Reliability Qualification
SHIP 07
Shipment to Manufacturers
UPW Quality 18.2 MΩ·cm at / near theoretical maximum resistivity
SEMI F63 ASTM D5127
Effluent Reuse
93%
treated effluent recovered as pre-treated UPW feed
Closed-loop recovery → Zero Liquid Discharge

Highly contaminated streams — acidic etch baths, alkaline developers, CMP slurries, solvent rinses and cooling-tower blowdown — are segregated and treated through our advanced recovery train. The remaining concentrated reject is eliminated via Multi-Effect Evaporation (MEE) or Mechanical Vapour Recompression (MVR) for complete ZLD.

MEE MVR Zero Liquid Discharge
Our Solutions for this Industry
i Ultra-Pure Water (UPW) Generation Multi-stage trains to 18.2 MΩ·cm → ii UPW Storage & Loop Distribution Continuous recirculation loops → iii Point-of-Use Polishing Final polish at the tool → iv Electrodeionization (EDI) Chemical-free deionisation → v Wastewater Segregation & Recovery Stream-specific treatment → vi Zero Liquid Discharge (ZLD) MEE / MVR concentrate elimination → vii Utility Equipment Treatment Boilers · Cooling towers · Scrubbers →